Description
High vacuum angle valve series XL provides excellent thermal conductivity
results in a uniform temperature for the entire valve body and a marked
decrease in the condensation of gases inside the valve. The valve does not
contain heavy metals such as Ni (nickel) or Cr (chrome) and a low
sputtering yield also helps to minimize heavy metal contamination of
semiconductor wafers.
– Light weight and compact
– Uniform baking temperature
– High fluorine resistance
– Low outgassing
– Little heavy metal contamination
Download XLDV Datasheet by click the link Datasheet.
