Description
High vacuum angle valve series XL provides excellent thermal conductivity
results in a uniform temperature for the entire valve body and a marked
decrease in the condensation of gases inside the valve. The valve does not
contain heavy metals such as Ni (nickel) or Cr (chrome) and a low
sputtering yield also helps to minimize heavy metal contamination of
semiconductor wafers.
– Air pressure applied to pilot port shifts piston-coupled valve
– Replaceable bellows reduces maintenance cost and waste material
– Additional maintenance parts available to extend useful life of valve
– Standard FKM seals, plus 8 additional seal compound options
– Auto switches mountable from 4 directions
– Optional 100°C and 150°C heaters (UL compliant lead wire)
Download XLC Datasheet by click the link Datasheet.
