HRZ-F SEMI Standard Double Inverter Chiller for Tap or DI Water Coolant

HRZ-F recirculating chillers are especially suited for high technology
sectors, by conforming to several SEMI equipment standards and regulating
fluid temperature to ±0.1°C. Both the pump and compressor rotations are
inverter controlled for energy efficiency. Refrigerant is R410A, compliant
with current EU F-gas regulations. This model is compatible with tap water
or deionized water for the coolant.

– Cooling capacities: 2kW, 4kW, 8kW, 10kW
– Circulating Fluid: tap water or DI water
– Temperature range setting: 10 to 60°C
– Temperature stability: ±0.1°C
– Power supply requirement: 3-phase 200 VAC/50Hz or 3-phase 200~208
VAC/60Hz
– Standards: CE, UL, RoHS, SEMI S2, S8, F47

Download HRZ-F Datasheet by click the link Datasheet.