HRZ-F SEMI Standard Pump Inverter Chiller for Fluorinated Coolant

HRZ-F recirculating chillers are especially suited for high technology
sectors, by conforming to several SEMI equipment standards and regulating
fluid temperature to ±0.1°C. This model includes inverter control of the
pump rotations for energy efficiency. Refrigerant is R410A, compliant with
current EU F-gas regulations. This model is compatible with fluorinated
coolants including Fluorinert™ and GALDEN®.

– Cooling capacities: 8kW
– Circulating Fluid: Fluorinert™ or GALDEN® (see catalog for
compatibility)
– Temperature range setting: -20 to 40°C
– Temperature stability: ±0.1°C
– Power supply requirement: 3-phase 200 VAC/50Hz or 3-phase 200~208
VAC/60Hz
– Standards: CE, UL, RoHS, SEMI S2, S8, F47

Download HRZ-F Datasheet by click the link Datasheet.