Description
Series XGT slit valve is suitable for the partition valve between the load
lock chamber and the transfer chamber, and between the transfer chamber and
the process chamber in semiconductor manufacturing equipment, etc.
– Long service life: 3 million cycles (within standard temperture range)
– Low particle generation: reduced by 1/5 or more (compared with the
current product)
– Easier maintenance
– Easy replacement of bellows
– Gate can be replaced from above (Made to order)
– Safety measures
– A mechanical end lock mechanism has been adopted
Download XGTx Datasheet by click the link Datasheet.
