Description
High vacuum angle valve series XL provides excellent thermal conductivity
results in a uniform temperature for the entire valve body and a marked
decrease in the condensation of gases inside the valve. The valve does not
contain heavy metals such as Ni (nickel) or Cr (chrome) and a low
sputtering yield also helps to minimize heavy metal contamination of
semiconductor wafers.
XLF is a normally closed, single acting high vacuum angle valve with an
O-ring shaft seal. The XL*-2 family shares common features with all series
members. Bodies are made of aluminum for light weight and excellent
thermal conductivity, resulting in a uniform temperature for the entire
valve body. The body offers excellent resistance to fluorine corrosion. A
low sputtering yield and the absence of heavy metals avoid wafer
contamination.
Download XLF Datasheet by click the link Datasheet.
