Description
High vacuum angle valve series XL provides excellent thermal conductivity
results in a uniform temperature for the entire valve body and a marked
decrease in the condensation of gases inside the valve. The valve does not
contain heavy metals such as Ni (nickel) or Cr (chrome) and a low
sputtering yield also helps to minimize heavy metal contamination of
semiconductor wafers.
– One-touch connection & release, requires no tools
– Lightweight & compact
– Auto switch capable
– XLAQ: single acting, normally closed, bellows seal
– XLAQ: flange sizes are 16, 25, 40, 50
– XLDQ: 2-step control, single acting
– XLDQ: flange sizes are 40, 50
Download XLxQ Datasheet by click the link Datasheet.
