Series AP is an ultra high purity (UHP) diaphragm valve for gas delivery in
semiconductor and other clean industries. The series is available in air
operated and manually operated valves with low and high
pressures. Available options include Hastelloy® C22, 316L SS secondary
remelt.
– Two step mode – metered flow and full open
– Two separate actuation ports
– Soft start valve to minimize vacuum chamber pressurization turbulence
– Metered flow adjustable
– Pneumatically actuated normally closed
– Body material: 316L SS secondary remelt
Download AP3571-4571 Datasheet by click the link Datasheet.
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