Series AZ is an ultra high purity (UHP)diaphragm valve for gas delivery in
semiconductor and other clean industries. This series is available in air
operated.
– Cleaned for high purity semiconductor applications
– Cleanroom assembled and Helium leaked tested
– Valve meets dimensional requirements of SEMI F36-0299, Option 1
– User-friendly forged body
– M5 actuation port
– Compact and lightweight
Download AZ3542-AZ4542 Datasheet by click the link Datasheet.
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