SL5200 Single Stage Compact Regulator for Ultra High Purity

Series SL is an ultra high purity (UHP) regulator for gas delivery in
semiconductor and other clean industries. The series has a springless
design (no poppet spring in the wetted area), and is available in low
to intermediate flow capacities. Available options include Hastelloy® internals
for corrosion resistance, a tube weld fitting connection type, and various
surface finishes.

– For UHP gas delivery
– Standard flow capacity: to 30 slpm; high flow capacity: to 130 slpm
– Body material: 316L SS secondary remelt
– Hastelloy® internals available for corrosion resistance
– Sub-atmospheric pressure delivery option

Download SL5200 Datasheet by click the link Datasheet.