Description
Series XLA are high vacuum angle valves for use in industrial applications
employing high vacuum and process gases. Common industries that may use
these angle valves include semiconductor, solar and other electronics
production, as well as food and pharmaceutical manufacturing. XLA valves
are single-acting, normally closed, with a bellows seal over the shaft and
spring. The vavle opens when pressure is applied at the pilot port. The
bellows assembly can be replaced, reducing maintenance costs and waste
materials. The valve body is hard anodized A6063 aluminum, with 304
stainless steel valves and bellows. Numerous seal materials are available
for a wide range of chmical compatibility.
– Excellent thermal conductivity offers uniform temperature and
decreased gas condensation inside valve
– High corrosion resistance to fluorine gas
– Minimal outgassing
– Minimal contamination from heavy metals
– Optional heaters
– Optional position sensors
– Optional oxalic acid anodizing for internals
Download XLA Datasheet by click the link Datasheet.
