Description
XLF is a normally closed, single acting high vacuum angle valve with an
O-ring shaft seal. The XL* family shares common features with all series
members. Bodies are made of aluminum for light weight and excellent
thermal conductivity, resulting in a uniform temperature for the entire
valve body. The body offers excellent resistance to fluorine corrosion. A
low sputtering yield and the absence of heavy metals avoid wafer
contamination.
– Air pressure applied to pilot port shifts opens piston-coupled valve
– Numerous maintenance parts available to extend useful life of valve
– Standard FKM seals, plus 8 additional seal compound options
– Auto switches mountable from 4-directions
– Optional 100°C to 150°C heaters (UL compliant lead wire)
Download XLF Datasheet by click the link Datasheet.
