Description
Series XLFV is a high vacuum angle valve for use in industrial applications
employing high vacuum and process gases. Common industries that may use
this angle valve include semiconductor, solar and other electronics
production, as well as food and pharmaceutical manufacturing. The XLFV
valves are single-acting, normally closed. The spring an shaft are exposed
to gas flow, but a scraper and O-ring seal the piston pressure volume from
process gases. The XLFV opens when pressure is applied at the pilot port,
which is controlled by a body mounted solenoid valve. The valve body is
hard anodized A6063 aluminum, with 304 stainless steel valves and an
electroless nickel plated steel spring. The XLFV bellows are 316L
stainless steel. Numerous seal material are available for a wide range of
chemical compatibility.
– Excellent thermal conductivity offers uniform temperature and
decreased gas condensation inside valve
– High corrosion resistance to fluorine gas
– Minimal outgassing
– Minimal contamination from heavy metals
– Optional heaters
– Optional position sensors
– Optional oxalic acid anodizing for internals
Download XLFV Datasheet by click the link Datasheet.
