Description
Series AP is an ultra high purity (UHP) diaphragm valve for gas delivery in
semiconductor and other clean industries. The series is available in air
operated and manually operated valves with low and high
pressures. Available options include Hastelloy® C22, 316L SS secondary
remelt, and the choice of normally closed or normally open indicator switch.
– Suitable for UHP gas supply line
– Body material: 316L SS secondary remelt
– Pneumatically actuated normally closed
– High pressure type: 20.7 MPa and 9 MPa
– Designed for bulk specialty gas (BSGS) delivery
– LOTO option available as an option
Download AP3130-3113 Datasheet by click the link Datasheet.
