Description
XLC is a double acting high vacuum angle valve with a bellows seal for the
shaft. The XL* family shares common features with all series members.
Bodies are made of aluminum for lightweight and excellent thermal
conductivity, resulting in a uniform temperature for the entire valve body.
The body offers excellent resistance to fluorine corrosion. A low
sputtering yield and the absence of heavy metals avoid wafer contamination.
– Air pressure applied to pilot port shifts piston-coupled valve
– Replaceable bellows reduces maintenance cost and waste material
– Additional maintenance parts available to extend useful life of valve
– Standard FKM seals, plus 8 additional seal compound options
– Auto switches mountable from 4 directions
– Optional 100°C and 150°C heaters (UL compliant lead wire)
Download XLC Datasheet by click the link Datasheet.
