Description
XLG is a double acting high vacuum angle valve with an O-ring shaft seal.
The XL* family shares common features with all series members. Bodies are
made of aluminum for light weight and excellent thermal conductivity,
resulting in a uniform temperature for the entire valve body. The body
offers excellent resistance to fluorine corrosion. A low sputtering yield
and the absence of heavy metals avoid wafer contamination
– Air pressure applied to pilot port shifts piston-coupled valve
– Numerous maintenance parts available to extend useful life of valve
– Standard FKM seals, plus 8 additional seal compound options
– Auto switches mountable from 4 directions
– Optional 100°C and 150°C heaters (UL compliant lead wire)
Download XLG Datasheet by click the link Datasheet.
