Description
High vacuum angle valve series XL provides excellent thermal conductivity
results in a uniform temperature for the entire valve body and a marked
decrease in the condensation of gases inside the valve. The valve does not
contain heavy metals such as Ni (nickel) or Cr (chrome) and a low
sputtering yield also helps to minimize heavy metal contamination of
semiconductor wafers.
– Compatible with inert gases
– Flange sizes: 25 and 40
– Operating pressure range: Atmospheric to 0.01 Pa
– Operating temperature: 5-40°C
– Voltage options: (100, 110, 200, 220, 230, 240)VAC; (12, 24)VDC
Download XLJ Datasheet by click the link Datasheet.
